o**o
发帖数: 10 | 1 all of the recipes I found online react with PMMA much faster than Cu and Ag.
Who knows how to make patterns on Cu film? I choose EBL. Is there any
other better method? The line width is about 100 nm to 1000 nm.
Can you contact with me via mitbbs email? Thanks so much! |
o**o
发帖数: 10 | 2 whoever can solve this question, I will give him/her all of my ids' mitbbs
money
Ag.
【在 o**o 的大作中提到】
: all of the recipes I found online react with PMMA much faster than Cu and Ag.
: Who knows how to make patterns on Cu film? I choose EBL. Is there any
: other better method? The line width is about 100 nm to 1000 nm.
: Can you contact with me via mitbbs email? Thanks so much!
|
s*n
发帖数: 2603 | 3 try FIB
Ag.
【在 o**o 的大作中提到】
: all of the recipes I found online react with PMMA much faster than Cu and Ag.
: Who knows how to make patterns on Cu film? I choose EBL. Is there any
: other better method? The line width is about 100 nm to 1000 nm.
: Can you contact with me via mitbbs email? Thanks so much!
|
h***s
发帖数: 111 | 4 RIE might not work.
You may try pattern PMMA first, then deposit Cu or Ag, then liftoff.
Ag.
【在 o**o 的大作中提到】
: all of the recipes I found online react with PMMA much faster than Cu and Ag.
: Who knows how to make patterns on Cu film? I choose EBL. Is there any
: other better method? The line width is about 100 nm to 1000 nm.
: Can you contact with me via mitbbs email? Thanks so much!
|
c**y
发帖数: 99 | 5 Cu is very difficult to pattern using RIE method. Industry people generate
the pattern using "damacene" method. In our lab, we pattern the Cu film by
combining the photolithgraphy and electroplating.
Ag.
【在 o**o 的大作中提到】
: all of the recipes I found online react with PMMA much faster than Cu and Ag.
: Who knows how to make patterns on Cu film? I choose EBL. Is there any
: other better method? The line width is about 100 nm to 1000 nm.
: Can you contact with me via mitbbs email? Thanks so much!
|
