d****t
发帖数: 2 | 1 那位大虾知道MIT哪个研究所或研究组有XeF2(Xenon Difluoride)etching工具？我实验
中需要把silicon腐蚀掉，形成一个SiO2的membrane. 万分感谢 | t********4
发帖数: 14 | 2 There's a paper actually produced by Leonel R Arana in Department of
Chemical Engineering,MIT, titled with "Isotropic etching of silicon in
fluorine gas for MEMS micromachining".
Try this paper, hopefully it could help. But it seems that the etch tool
might be available in Microsystems Technology Laboratories. |
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