s****e
发帖数: 2934 | 1 最近用一个，室温下结晶微热变成粘稠的液体的小分子作sipincoating，这个粘稠的液
体不能wet substrate，10%的溶液也不能wet substrate，用50％的浓度的溶液倒是可
以（奇怪）。解决不了在spincoating过程中后期结晶的问题。微热会使溶剂蒸发，结
果也不能wet substrate。有哪位能给点建议的？多谢了。 |
m*******e
发帖数: 119 | 2 MIBK has low surface energy (24 dyne/cm). Toluene is about 28, similar to
xylene. They have meidum boiling points and vapor pressure. Low boiling
point and high vapor pressure allow the solvent to evaporate very quickly,
which may help to reduce crystalization effect in your film. But the problem
is that you might not be able to get nice uniform film due to high
evaporation rate. You can check other solvents that you can find. The
physical properties of the solvents can be found from Belstein da |
M*********2
发帖数: 549 | 3 Use HMDS treat silicon wafer first. It may help.
such
substrate
【在 m*******e 的大作中提到】
: MIBK has low surface energy (24 dyne/cm). Toluene is about 28, similar to
: xylene. They have meidum boiling points and vapor pressure. Low boiling
: point and high vapor pressure allow the solvent to evaporate very quickly,
: which may help to reduce crystalization effect in your film. But the problem
: is that you might not be able to get nice uniform film due to high
: evaporation rate. You can check other solvents that you can find. The
: physical properties of the solvents can be found from Belstein da
|
s****e
发帖数: 2934 | 4 Thank you very much for your comprehensive information!
I need to measure electric properties of my compound, so a thin layer of
PMMA is not ok for me. My compound is also a silicone compound, which is a
nonpolar. I have tried xylene, toluene, hexane, THF, ether. For xylene and
toluene, only 50%-40% can fully wet the wafer before I spin the spinner. So
all the other concentration can not fully wet the surface, everything is
gone when spin for 2mins at 1500RPM. For the 40% one, crystalline is big |
s****e
发帖数: 2934 | 5 呵呵，多谢了。哪些solvent是low surface energy的啊？ 我不能加其他的东西，我要
测film的很多性质。
such
substrate
【在 m*******e 的大作中提到】
: MIBK has low surface energy (24 dyne/cm). Toluene is about 28, similar to
: xylene. They have meidum boiling points and vapor pressure. Low boiling
: point and high vapor pressure allow the solvent to evaporate very quickly,
: which may help to reduce crystalization effect in your film. But the problem
: is that you might not be able to get nice uniform film due to high
: evaporation rate. You can check other solvents that you can find. The
: physical properties of the solvents can be found from Belstein da
|
m*******e
发帖数: 119 | 6 MIBK has low surface energy (24 dyne/cm). Toluene is about 28, similar to
xylene. They have meidum boiling points and vapor pressure. Low boiling
point and high vapor pressure allow the solvent to evaporate very quickly,
which may help to reduce crystalization effect in your film. But the problem
is that you might not be able to get nice uniform film due to high
evaporation rate. You can check other solvents that you can find. The
physical properties of the solvents can be found from Belstein da |
s****e
发帖数: 2934 | 7 呵呵，多谢了。哪些solvent是low surface energy的啊？ 我不能加其他的东西，我要
测film的很多性质。
such
substrate
【在 m*******e 的大作中提到】
: MIBK has low surface energy (24 dyne/cm). Toluene is about 28, similar to
: xylene. They have meidum boiling points and vapor pressure. Low boiling
: point and high vapor pressure allow the solvent to evaporate very quickly,
: which may help to reduce crystalization effect in your film. But the problem
: is that you might not be able to get nice uniform film due to high
: evaporation rate. You can check other solvents that you can find. The
: physical properties of the solvents can be found from Belstein da
|
m*******e
发帖数: 119 | 8 If possible, try toluene or MIBK (methyl isobutyl ketone) |
s****e
发帖数: 2934 | 9 silicon is high surface energy, but it will be oxidized to SiO2, then the
surface energy becomes lower. Could you tell me what kind of solvent is low
surface energy? Yes, you are right, I did find that high concentration
dewetting slowly and gave me thicker film. But I need a film like 500nm
thick...
such
【在 m*******e 的大作中提到】
: If possible, try toluene or MIBK (methyl isobutyl ketone)
|
